R631BM / R631DF (Wafer Grinding) | JTEKT Machinery North America
R631 BM

R631BM / R631DF

The R631BM / R631DF is a specialized high-precision grinder developed to process hard and brittle wafers, offering an advanced alternative to conventional lapping machines. Designed for today’s demanding semiconductor applications, this vertical single-disc grinder delivers outstanding accuracy, reliability, and repeatability, even with difficult-to-grind materials. Its fully automated cassette-to-cassette handling system ensures seamless wafer transfer, while grinding parameters for each wafer are stored individually—providing full traceability and process control.

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Precision Grinding for Hard and Composite Materials

Equipped with an air static pressure bearing spindle and built-in servo motor, the R631BM / R631DF achieves exceptionally low vibration and high rigidity, ensuring micron-level accuracy under load. This enables precise machining of wafers made from Al₂O₃, SiC, GaN, and other advanced materials, as well as composite wafers combining brittle substrates with resin or metal layers. With a misorientation angle correction capability of ±0.02°, the machine guarantees precise crystal orientation alignment for superior wafer flatness and quality.


Models & Specifications

Grinding Capacity: O.D. (Max)in (mm)7.87 (φ200)
Grinding Capacity: T (Max)in (mm)0.098 (2.5)
Grinding Wheel Size: O.D. (Max)in (mm)12.00 (φ305)
Floor Space: WxDin (mm)66.54 x 107.09 (1,690 × 2,720)
Machine Weightlb (Kg)13,230 (6,000)

Related News

KOYO News Thumbnail KOYO Machinery USA merges with JTEKT Machinery Americas

Effective January 1, 2024 - Koyo Machinery USA, a leading provider of precision grinding machines and systems for production applications, will be integrated...